2 |
White residue formed on the SU-8 pattern |
The SU-8 photoresist is not fully developed |
For mild residue issue, immerse the SU-8 patterned substrate into SU-8 developer for 30 s and dry the substrate to remove the white residue. For severe residue issue, immerse the SU-8 patterned substrate into acetone for 30 s and dry it with an air stream |
8 |
Pattern distortion after development of the SPR-3012 photoresist |
The photoresist is under-exposed or over-exposed |
Measure the width of the developed pattern under the microscope. Increase or decrease the exposure time based on the measured results to achieve accurate pattern. Restart the process from step 7
|
19 |
Defect in bonding between the LiNbO3 substrate and the microfluidic chamber |
Mishandling in the APTES coating and plasma treatment process |
Remove the defect PDMS chamber from the LiNbO3 substrate with a razor blade. Clean the PDMS residue and dry it with an air stream. Recycle the LiNbO3 substrate and restart the process from step 14
|
20 |
Short circuit of the interdigital transducers |
Defect in electrode fabrication or in silver epoxy process |
Examine all the electrodes under an upright microscope. For the electrode damaged due to the fabrication process, the device cannot be used and recycled. For silver epoxy induced short circuit, scratch the epoxy to disconnect the shorted electrodes. |
36 |
Air bubble trapped in the microfluidic chamber |
Bubble trapped in the PBS, needle, or syringe |
For bubble trapped in the needle and syringe, carefully remove air bubbles by tapping and pushing the syringe before injecting the PBS. For bubble already trapped in the microfluidic chamber, infuse the PBS with higher infusion speed (300 μl min−1) to squeeze out the air droplets. |
64 |
Cell residue in the microfluidic chamber |
Adherent cell residue on the PDMS walls or the LiNbO3 substrate |
Inject ethanol with 5 ml syringe while sonicating the device to flush the microfluidic chamber for 2 min. Repeat this step if there is any residue detected under the microscope. |