Table 1.
Mask substrate preparation | Mask exposure/ printing | Mask development | Chemical corrosion treatment | Alcohol cleaning | Mold substrate surface treatment | Glue coating | Soft bake | Mold exposure/ printing | Post exposure bake | Mold development | Hard bake/ exposure | Graphic transfer | Degumming | |
2D laser direct writing [45] | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
2PP [46] | - | - | - | - | - | ✓ | - | - | ✓ | - | ✓ | - | ✓ | ✓ |