Table 2.

The time of each step to fabricate microfuidic chips based on 2D laser direct writing and 2PP. (Mold size X/Y/Z: 20,750 μm × 2,100 μm × 100 μm)

Mask substrate preparation

Mask exposure/ printing

Mask development

Chemical corrosion treatment

Alcohol cleaning

Mold substrate surface treatment

Glue coating

Soft bake

Mold exposure/ printing

Postexposure bake

Mold development

Hard bake/ exposure

Grafic transffer

Degumming

2D laser direct writing

-

2.5 h

<10 min

1 min

<1 min

30 min

10 min

12 min

10 min

10 min

10 min

6 min

1.5 h

2 h

2PP

-

-

-

-

-

-

-

-

1.25 h

-

10 min

6 min

1.5 h

2 h