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. Author manuscript; available in PMC: 2024 May 11.
Published in final edited form as: Appl Opt. 2023 Jul 10;62(20):5416–5426. doi: 10.1364/AO.495466

Table 2.

RMS Values of Deviations from Reference Flat Surfaces for All 36 Tilt Angles

α 1 α 2 α 3 α 4 α 5 α 6
β 1 8.123 14.102 25.494 11.491 9.618 7.431
β 2 9.541 16.709 21.117 7.222 5.560 10.623
β 3 15.833 20.685 7.512 4.879 9.298 15.607
β 4 23.753 8.360 5.717 8.530 12.858 28.116
β 5 10.107 6.473 8.077 9.969 17.094 12.647
β 6 6.869 10.948 16.699 22.766 8.291 5.954