Band shape fitting of the three C (1s) components of HRXPS of photoresist (3).
Dose (mJ cm−2) | COO | CH CH2 | n-Bu/t-Bu |
---|---|---|---|
unexposed | 4.8 ± 0.1 (6.5 ± 0.1)a | 14 ± 1 (7.0 ± 0.1) | 81 ± 1 (87 ± 1) |
30 | 5.6 ± 0.1 | 22.±1 | 72 ± 1 |
60 | 5.8 ± 0.1 | 24 ± 1 | 71 ± 1 |
90 | 5.9 ± 0.1 | 23 ± 1 | 71 ± 1 |
120 | 6.2 ± 0.1 | 23 ± 1 | 70 ± 1 |
150 | 6.2 ± 0.1 | 23 ± 1 | 71 ± 1 |
The number in the bracket is the expected value calculated from a weight ratio of [1]/[2] = 1.1 : 1.9.