Skip to main content
. 2024 Apr 9;6(11):2928–2944. doi: 10.1039/d4na00006d

Band shape fitting of the three C (1s) components of HRXPS of photoresist (3).

Dose (mJ cm−2) COO CH Created by potrace 1.16, written by Peter Selinger 2001-2019 CH2 n-Bu/t-Bu
unexposed 4.8 ± 0.1 (6.5 ± 0.1)a 14 ± 1 (7.0 ± 0.1) 81 ± 1 (87 ± 1)
30 5.6 ± 0.1 22.±1 72 ± 1
60 5.8 ± 0.1 24 ± 1 71 ± 1
90 5.9 ± 0.1 23 ± 1 71 ± 1
120 6.2 ± 0.1 23 ± 1 70 ± 1
150 6.2 ± 0.1 23 ± 1 71 ± 1
a

The number in the bracket is the expected value calculated from a weight ratio of [1]/[2] = 1.1 : 1.9.