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. 2024 Apr 9;6(11):2928–2944. doi: 10.1039/d4na00006d

Analysis of two O (1s) components from band shape fitting of the HRXPS of photoresist 3.

Dose (mJ cm−2) Percentage (%)a
SnO CO2Sn
unexposed 58 ± 1 (65 ± 1) 42 ± 1 (35 ± 1)
30 61 ± 1 39 ± 1
60 61 ± 1 39 ± 1
90 63 ± 1 36 ± 1
120 66 ± 1 34 ± 1
150 67 ± 1 33 ± 1
a

The value in the bracket is the theoretical value using a weight ratio of (1)/(2) = 1.1 : 1.9.