Analysis of two O (1s) components from band shape fitting of the HRXPS of photoresist 3.
Dose (mJ cm−2) | Percentage (%)a | |
---|---|---|
SnO | CO2Sn | |
unexposed | 58 ± 1 (65 ± 1) | 42 ± 1 (35 ± 1) |
30 | 61 ± 1 | 39 ± 1 |
60 | 61 ± 1 | 39 ± 1 |
90 | 63 ± 1 | 36 ± 1 |
120 | 66 ± 1 | 34 ± 1 |
150 | 67 ± 1 | 33 ± 1 |
The value in the bracket is the theoretical value using a weight ratio of (1)/(2) = 1.1 : 1.9.