| MEMS | Micro-Electromechanical Systems |
| DUV | Deep Ultraviolet |
| EUV | Extreme Ultraviolet |
| CARs | Chemically Amplified Resists |
| n-CARs | Non-Chemically Amplified Resists |
| LER | Line Edge Roughness |
| LWR | Line Width Roughness |
| PMMA | Poly(methyl methacrylate) |
| DNQ | Diazonaphthoquinone |
| DFP | Dry Film Photoresist |
| PCB | Printed Circuit Board |
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