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(a) HR-XRD ω/2θ broad scan spectra ranging from 15° to 75° for as-grown, 400 °C, 600 °C, and 800 °C annealed-Ga2O3/Pt/sapphire, and (b) measurement of ω/2θ spectra focused on the low-XRD-intensity region to identify weak β-Ga2O3 (−201) and (−603) peaks.
