Table 2. Sine wave test of the algorithm at various amplitudes and spatial frequencies.

	Amplitude (±)
	3 × 10−6 nm	1 nm	10 nm	100 nm	1000 nm	3 × 103 nm
Spatial frequency	80 m−1	40 m−1	20 m−1	10 m−1	5 m−1	5 m−1
Residuals (r.m.s.)	0.5%	0.7%	1.2%	2.4%	4.6%	7.7%