Table 2. Specifications of the 100 diamond crystal mirrors.

Parameter	Value
Crystal plate size	∼7 mm × 7 mm (irregular)
Plate thickness	500 ± 100 µm
Surface roughness	5 nm
Miscut angle	<0.3°
Bragg-plane slope error	<0.2 µrad mm−2 over a ∼2 mm × 2 mm working area
Phase errors	≲λ/70 r.m.s. over ∼100 µm × 100 µm