Table 4.

Structure of HSiF (bond lengths in Å, angle in degrees).

Method	r(Si-H)	r(Si-F)	∠(HSiF)	Refs.
$r_{\mathrm{e}}^z$ a	1.528(5)	1.603(3)	96.9(5)	[52]
re a	1.529(6)	1.603(1)	96.9(3)	[30]
MP2/6-311+G(3df,2pd)	1.5201	1.6250	96.59	This work
MP2/cc-pVTZ b	1.5230	1.6132	96.90	This work
$r_{\mathrm{e}}^{\mathrm{S}\mathrm{E}}$	1.5227(8)	1.6028(2)	96.75(8)	This work

^a Derived from the r_z structure. ^b cc-pV(T+d)Z on Si.