Summary of experimental values at room temperature for different silicon membrane types, including Seebeck coefficient, electrical conductivity, thermal conductivity, and zT figure of merit.

Type	κ (W m−1 K−1)	S tot (μV K−1)	S e (μV K−1)	S ph (μV K−1)	σ (kS m−1)	zT
p-Type plain	31	424	182	242	10.08	0.017
n-Type plain	31	−451	−263	−188	13.18	0.026
p-Type PE	18	440	N/A	N/A	7.22	0.023
n-Type PE	18	−504	N/A	N/A	9.45	0.04