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. 2024 Jul 8;25(1):2376522. doi: 10.1080/14686996.2024.2376522

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© 2024 The Author(s). Published by National Institute for Materials Science in partnership with Taylor & Francis Group.

This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. The terms on which this article has been published allow the posting of the Accepted Manuscript in a repository by the author(s) or with their consent.

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Figure 3. — Energy dispersive spectroscopy (EDS) spectra the control and fine-particle bombardment (FPB)-treated surfaces (FPB-10 and FPB-40). The elemental composition ratio of Si (atom%) for each sample is shown in the table in the figure.