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. 2024 Jul 11;17(14):3437. doi: 10.3390/ma17143437

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© 2024 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).

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Device schematic of the diamond VSBDs with (a) ion implantation and two epitaxial processes [122]. (b) Mo/Ni/Au triple metal for Schottky contacts [123]. (c) Dual barriers [124]. (d) Al₂O₃ field plate [126]. (e) Floating field limit rings [127]. (f) Dual field limiting rings [128].