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. 2024 Jul 11;17(14):3437. doi: 10.3390/ma17143437

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© 2024 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).

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(a) First hydrogen-terminated normally-off MESFET devices [168]. (b) Process Flow of hydrogen terminal MOSFETs [171]. (c) Hydrogen terminal MOSFETs with an Al₂O₃ gate dielectric layer [173].