Table 4.
Device | Structural Characteristics | VTH (V) | |ID_MAX| (mA/mm) |
Ion/Ioff | |BV|(V) | Ron (mΩ·cm2) |
BFOM (MW/cm2) |
Ref. |
---|---|---|---|---|---|---|---|---|
H-terminated MOSFETs |
NO2 p-type doping | 4.1 | 372 | >107 | 3659 | 13.48 | 173 | [177] |
ALD-Al2O3 (10 nm @ 450 °C) | 1.36 | 388 | ~2 × 107 | >50V | — | — | [229] | |
NO2 p-type doping | 3.9–4.1 | 680 | ~107 | 2568 | 7.54 | 874.6 | [39] | |
V2O5 gate dielectric layer (10 nm) | 1.7 | 375 | ~107 | — | 16.8 | — | [182] | |
N-implanted region in channel | −2.5 | 5.4/2.7 | >107 | 531/1600 | — | — | [228] | |
ALD-Al2O3 (200 nm @ 450 °C with partial C-O channel) | −2.5~−4.0 | 5.2~18.2 | 108 | 2021 | — | — | [198] | |
Si-terminated MOSFETs |
ALD-Al2O3 (100 nm @ 450 °C) | −5.6 | 311 | >107 | 150.2 | — | — | [230] |
Trench MOSFETs | Vertical U-trench | 17.8 | 210 | ~106 | 580 | 23 | 14.6 | [231] |
Vertical V-trench | 20.2~20.5 | 12,800 | ~107 | 340 | 3.2 | 31.0 | [221] | |
Vertical U-trench with n-implanted/n-doped epitaxial layer | 23.2/23.0 | 234/191 | ~108 | 249/359 | 31/41 | 2/3.1 | [220] | |
JFETs | Lateral p-n junctions | — | 1.2 | — | 608 | 3.7 | 99.91 | [223] |
BJTs | On (001) | αT = 0.44, β = 0.79, diffusion length = 4.2 × 10−5 cm3 αT = 0.91, β = 10.1, diffusion length = 4.3 × 10−5 cm3 |
[212] | |||||
On (111) | [232] | |||||||
HBTs | p-n-p:lGaAs/GaAs/Diamond (e-b-c) |
e-b:AlGaAs/GaAs n = 1.09, Ion/Ioff = 1.53 × 107 at ±1.5 V |
β ≈ 1 | [213] | ||||
b-c:GaAs/diamond n = 3.67, Ion/Ioff = 3.74 × 1010 at ±5.2V |