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. 2024 Jul 22;18(30):19732–19741. doi: 10.1021/acsnano.4c05251

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© 2024 The Authors. Published by American Chemical Society

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Cross-sectional TEM images of bare Nb and Ta-capped Nb thin films. a, Cross-sectional bright-field TEM image and b, high-resolution TEM image of the bare Nb thin film on Si. c, HAADF-STEM image and d, e, the corresponding EDS elemental distribution maps of Nb and O at the NbO_x-Nb interface. f, Cross-sectional bright-field TEM image and g, high-resolution TEM image of the Ta-capped Nb thin film on Si. h, HAADF-STEM image and i, j, the corresponding EDS elemental distribution map of Ta and O at the TaO_x-Ta-Nb interface. k, Atomic-resolution HAADF-STEM showing epitaxial growth of Ta on Nb.