Fig. 2. Large angle calibration of the meta SHWFS.
a Experimental setup for large angle calibration and the SEM image of the fabricated metalenses. b Focal intensity distribution created by the metalens array. The numbers outside the image denote the order of the metalenses. White dotted lines indicate the central lines of each metalens. The lower plot depicts the intensity profile along the yellow line. c Focal spot behaviors of a central metalens for different angles of incidence, following the equation ∆i = f tanθi (i = x, y). d Focal spot displacements for various incident angles. The 100 × 100 focal spots uniformly move together as the incident angle changes. The large fluctuations in spot localization for the large angles beyond 8° is attributed to cross-talk between the focal spots of adjacent metalenses