(A-C) Thin-film microelectrodes: (A) 1 kHz impedance modulus (EtO: 3 devices, n = 96 channels, AC: 2 devices, n = 53 channels, H2O2 plasma: 3 devices, n = 86 channels). (B) Full-band EIS impedance and phase spectra. (C) DC conductivity (n = 30 samples each). (D-F) MXtrodes: (D) 1 kHz impedance modulus (sample size: 5 devices each, n = 40 channels). (E) Full-band EIS impedance and phase spectra. (F) DC conductivity (n = 45 samples each). (* effect size > 1 / ** effect size > 2 / *** effect size > 3). In (B) and (E) points are means, shaded areas are standard deviations.