Mid-IR setup and measurements. (a) Schematic
of the mid-IR measurement
setup, showing the components and connections to the integrated thermal
emitter on the sample. In (b,c) the camera focuses on the emitter
and one of the output grating couplers. (b) Mid-IR camera image of
a thermal emitter operated at 185 mW. The emitter, contact pads, and
probes are visible on the right. The waveguide output grating coupler
is visible on the left. The length of the waveguide between the grating
coupler and emitter is 725 μm. Inset: Extraction of the output
grating with enhanced contrast (using a different color scale), to
visualize the radiation pattern of the outcoupled light and the scattering
from the waveguide. The scale bar is valid for the entire (b). (c)
Mid-IR camera images of the emitter and grating coupler from (b),
at different power levels.