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. 2024 Sep 9;10:125. doi: 10.1038/s41378-024-00754-w

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© The Author(s) 2024

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Fig. 11 — X-ray photoemission spectra of a Ti electrode restructured at 89 MJ/cm² fluence, and b sputter-deposited TiN planar films; spectra obtained after different etch times are offset vertically for clarity to show spectral changes as a function of depth below the surface