Figure 1.

(Top) 3D Schematics of designed microchips (scale bar 3 μm). (Bottom) SEM images of the polysilicon microchips. A) 3 × 3 × 0.5 μm³ cuboids, B) 3 × 3 × 0.05 μm³ cuboids, C) 3 × 3 × 3 μm³ cubes, D) 3 × 15 × 0.5 μm³ bars, E) 3 × 15 × 0.05 μm³ bars, F) 3 × 10 × 0.5 μm³ bars, G) cylinders’ diameter 3 μm, thickness 0.5 μm, H) cylinders’ diameter 4 μm, thickness 0.5 μm, I) cylinders’ diameter 3 μm, thickness 0.05 μm (Scale bars = 1 μm).