Table 1.

Milling pattern parameters for Serial Lift-Out

Step	Pattern type	Beam current	Multipass number	Approximate time
Copper block milling	Regular cross-section	5–65 nA	4	20 min
Copper block attachment	Regular cross-section	1 nA	1	3 min
Trench milling	Regular cross-section	3 nA	4	N/A
Extraction volume attachment	Regular cross-section	1 nA	1	3 min
Extraction volume release	Line	3 nA	N/A	10 min
Pin or grid bar attachment	Regular cross-section	1 nA	1	4–8 min
Sectioning	Line	0.5–1 nA	N/A	8–12 min

The table summarizes the parameters used for the milling steps necessary to perform a Serial Lift-Out experiment. The corresponding pattern geometries are illustrated in Extended Data Fig. 10. All patterns were milled at an FIB acceleration voltage of 30.00 kV. Pattern files for Thermo Fisher Scientific instruments are provided in Supplementary Data 1. These templates and the milling parameters may need adjustment for different projects and for FIB–SEM instruments from other manufacturers, specifically concerning differing scanning strategies deployed by the microscope manufacturer. Parameters not applicable to the line patterns are labeled N/A.