Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
(a) Lithography technology advancement from 1970 to 2020. (b) DUV and EUV lithography comparison [6]. (c) Photochemical reactions of EUV photoresist (reprinted with permission from ref. [5], 2023, Elsevier). (d) Definitions of line edge roughness and line width roughness (reprinted with permission from ref. [7], 2016, Elsevier). (e) Absorption coefficient of different metal oxide photoresists at EUV as compared to traditional CAR (reprinted with permission from ref. [8], 2002, SPIE).
