Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
(a) SEM and AFM images of tin oxo cage thin films patterned with 3.6 mJ/cm2 and 53.5 mJ/cm2 EUV doses, along with their corresponding cross-sectional profiles. (b) The spectra of thin layers with various EUV exposures and post-exposure baking, TGA of powder, highlighting weight changes and the loss of water, butene, and butane with temperature [89].
