Figure 15.
SEM images of Zn-mTA cluster line and space dense patterns fabricated via EUV exposure: (a) 16 nm at a dose of 45 mJ/cm2, (b) 15 nm at a dose of 47 mJ/cm2, (c) 14 nm at a dose of 36 mJ/cm2, and (d) 13 nm at a dose of 35 mJ/cm2 [60].
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