Table 1.
Deposition conditions and thickness for the SZO thin films before and after FLA.
WZn | WAg | Time | Thickness (nm) | |
---|---|---|---|---|
(W) | (W) | (min) | As-grown | After FLA |
100 | 0 | 62 | 230 ± 23 | 270 ± 27 |
100 | 5 | 47 | 300 ± 30 | 310 ± 31 |
100 | 10 | 42 | 280 ± 28 | 310 ± 31 |
100 | 15 | 38 | 400 ± 40 | 320 ± 32 |
100 | 20 | 35 | 460 ± 46 | 320 ± 32 |