Table 3.
The average crystallite size, lattice parameters and in-plane stress (σ) of SZO thin films doped with low Ag concentration as-grown and after FLA.
|
WAg (W) |
Conditions | 2θpos (002) |
D (nm) |
Lattice Parameters |
c/a Ratio |
σ (GPa) |
|
|---|---|---|---|---|---|---|---|
| a = b (Å) | c (Å) | ||||||
| - | ZnO bulk | 34.422 | - | 3.250 | 5.205 | 1.602 | - |
| 0 | As-grown | 34.340 | 9.88 | 3.274 | 5.223 | 1.595 | −1.47 |
| 5 | 34.229 | 23.14 | 3.300 | 5.239 | 1.587 | −2.85 | |
| 10 | 33.958 | 25.50 | 3.330 | 5.276 | 1.584 | −6.05 | |
| 0 | After FLA | 34.529 | 14.53 | 3.251 | 5.195 | 1.598 | +0.95 |
| 5 | 34.578 | 29.72 | 3.265 | 5.188 | 1.589 | +1.55 | |
| 10 | 34.698 | 19.67 | 3.266 | 5.170 | 1.583 | +3.11 | |