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High-resolution optical emission spectra of N2/H2 plasmas at various N2/H2 gas ratios (a) at the wavelength ranging from 334.5 to 338 nm and (b) at the wavelength ranging from 335.5 to 336.5 nm. (c) Relationship between optical emission intensity of N2 and NH of N2/H2 plasmas at various N2/H2 gas ratios and working pressures of 4 and 2 Pa. Excitation power: 300 W, bias power: 200 W, and substrate temperature: 20 °C. The error bars in this figure are smaller than the symbol size.
