Fig. 3. TEM images of thermally oxidized cCVD Si nanoparticles at 300 °C (a) and 500 °C (b) treated in pH 9.0. HSSs are seen for the 300 °C heat treated nanoparticles, while the 500 °C heat treated nanoparticles are solid. EDS mapping (bottom panel) of the 500 °C treated cCVD Si sample after base treatment (pH 9.0). The distribution of silicon ((c) red) and oxygen ((d) green) and the dark field TEM image of the mapped region (e).
