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Wafer-scale MgB2 superconducting device demonstration. (a) Coplanar waveguide microwave resonators and other test chips patterned in MgB2 film deposited on a 100 mm sapphire substrate. (b) Optical image and (c, d) high-magnification SEM images (false color) for a resonator chip on the Si substrate. MgB2 film is denoted by the red area.
