Table 2. Summary of SCVD Synthesis of 2D TMDs.

TMDs	Source materials	Phase	Morphology	Thickness	Temperature (°C)	Substrate	Carrier gas (sccm)	Growth time [min]
MoS2	(NH4)2MoS4 + S32	2H	Nanosheet	1.5–2 nm	700	SiO2/Si	300Ar	14
	Na2MoO4 + NaOH + S33	2H	Nanosheet	2.07 nm	800	Sapphire		2
	(NH4)2MoO4 + KOH + S22	2H	Film	0.7 nm	750	Sapphire/SiO2/Si	30Ar	10
	MoO3 + NH4OH + S34	2H	Nanosheet	Monolayer	760–880	Glass	150Ar	5
	(NH4)6Mo7O24·4H2O + S35	2H	Film	0.6–2.5 nm	800	SiO2/Si	100Ar	10
	Na2MoO4·2H2O + C12H25SH36	2H	Nanosheet	Monolayer	850	SiO2/Si	10Ar	60
	(NH4)2MoO4 + KI + S37	2H	Film	1 nm	720	SiO2/Si	30Ar	3–5
	(NH4)2MoS417	2H	Film	2 nm	1000	Sapphire, SiO2/Si	80%Ar/20%H2	30
	(NH4)2MoO4 + S29	2H	Nanosheet	0.78 nm	750	Sapphire	Ar	20
	(NH4)2MoS438	2H	Film	2–30 nm	700	SiO2/Si	96%Ar/4% H2	60
	Na2MoO4·2H2O + (C2H5)2S39	2H	Film	0.7 nm	850	Sapphire, SiO2/Si	350Ar/10 H2	20
	Na2MoO4 + Mo(CO)6 + CH3SSCH340	2H	Film	0.9 nm	850	SiO2/Si	350Ar/15H2	20
	MoO3 + NH4OH + S41	2H	Film	0.8 nm	800	SiO2/Si	150Ar	5
	Na2MoO4 + S19	2H	Nanosheet	Monolayer	730–750	soda lime glass slide	80Ar	10–20
	Na2MoO4 + ZnS42	2H	Nanosheet	Monolayer	780	Sapphire/SiO2/Si	100Ar	10–60
	(NH4)2MoO4 + KI + S24	2H	Film	Monolayer	800	Sapphire	Ar	10
MoSe2	(NH4)2MoO4 + KI + Se24	2H	Film	Monolayer	800	sapphire	Ar/H2	10
	Na2MoO4 + Se19	2H	Nanosheet	Monolayer	750–800	soda lime glass slide	80Ar/8 H2	10–20
	Na2MoO4 + ZnSe42	2H	Nanosheet	Monolayer	800	Sapphire/SiO2/Si	100Ar	10–60
	Na2MoO4 + Na2SeO320	2H	Nanosheet	Monolayer	775–850	SiO2/Si	190Ar/10H2	5–10
WS2	(NH4)10H2(W2O7)6 + S32	2H	Nanosheet	1.5–2 nm	700	SiO2/Si	300Ar	14
	Na2WO4·H2O + N2H4 + (CH3)2S243	2H	Film	0.65 nm	850	SiO2/Si	350Ar	30
	Na2WO4 + S19	2H	Nanosheet	Monolayer	730–780	soda lime glass slide	80Ar/4H2	10–20
	Na2WO4 + ZnS42	2H	Nanosheet	Monolayer	930	Sapphire/SiO2/Si	100Ar	10–60
	(NH4)2WO4 + KI + S24	2H	Film	Monolayer	850	sapphire	Ar/H2	10
WSe2	Na2WO4 + ZnSe42	2H	Nanosheet	Monolayer	820	Sapphire/SiO2/Si	100Ar	10–60
	(NH4)2WO4 + KI + Se24	2H	Film	Monolayer	850	sapphire	Ar/H2	10
MoTe2	Na2MoO4 + Te19	1T’	Nanosheet		730–750	soda lime glass slide	120Ar/20H2;	10–20
	(NH4)6Mo7O24·4H2O + C24H39NaO5 + Te27	1T’	Nanosheet	0.8 nm	700/500	SiO2/Si	400N2/25H2;	5
	Na2MoO4 + ZnTe42	2H	Nanosheet	Monolayer	750–800	Sapphire/SiO2/Si	100Ar	10–60
	Na2MoO4 + ZnTe42	1T’	Nanosheet	Monolayer	800	Sapphire/SiO2/Si	100Ar	10–60
	(NH4)6Mo7O24 + NaOH + Te44	1T’	Nanosheet	0.82 ± 0.04 nm	730	SiO2/Si	100Ar/3H2	15
WTe2	Na2WO4 + ZnTe42	1T’	Nanosheet	Monolayer	780	Sapphire/SiO2/Si	100Ar	10–60
	(NH4)6H2W12O40 + Te28	1T’	Nanosheet	0.8 nm	650	SiO2/Si	N2/H2	6
	Na2WO4 + Na2TeO320	1T’	Nanosheet	2.1 nm	775–825	sapphire	95Ar/5H2	5
NbSe2	C4H4NNbO9·xH2O + NaOH + Se21	2H	Nanosheet	0.7 nm	800	SiO2/Si	600N2/15H2	20
ReSe2	NaReO4 + Na2SeO320	1T’	Nanosheet		750	sapphire	190Ar/10H2	5–10