Fig. 13. NEMS devices based on suspended graphene and characterization of suspended graphene in NEMS structures.

a A schematic view of a monolayer graphene sound-emitting device using anodic aluminum oxide (AAO) templates as substrates²⁴¹. b A schematic of a Pirani pressure sensor, in which multilayer graphene suspended over a SiO₂ cavity is the sensing element²⁴². c Graphene gas pumps²⁴⁴. d On-chip heaters for the tension tuning of graphene nanodrums²⁵⁶. e A schematic of a comb-drive (CD) actuator that applies uniaxial strain to a graphene flake by moving²⁵⁷. f AFM nanoindentation experiment of suspended graphene over cavities for measuring Young’s modulus²⁵⁹. Figures reproduced with permission from refs. ^{241,242,244,256,257,259}