Fig. 7. Fabrication of suspended graphene structures.

a A few-layer graphene suspended over an etched SU-8 trench for a high-quality factor NEMS resonator due to the thermal shrinkage of the SU-8-induced strain¹⁸⁰. b An AFM topography image of freely suspended few-layer graphene connected to an electrode¹⁷⁸. c Monolayer graphene suspended over an etched SiO₂ cavity for the NEMS resonator¹⁴. d SEM images of a graphene ribbon suspended between metal electrodes¹⁸². e SEM images of a high-mobility freely suspended graphene Hall bar that was fabricated on a polydimethylglutarimide-based organic polymer¹⁸¹. Figures reproduced with permission from refs. ^{14,178,180–182}