Table 1. Dimensions of the components of the chips for the two designs.

The estimated mean force due to the pressure difference (10⁵ Pa) for a 50 × 600 µm membrane is about 3 µN.

	Size (µm)
Parameter	Design 1	Design 2
Beam alignment marks length (L)	3500	4000
Beam alignment marks separation (S)	820	900
Back side membrane width (A)	800	770–800
Front side membrane width (a)	∼90	∼20–50
Back side membrane length (B)	1250	1350
Back side membrane length (b)	∼530	∼600