(a) DSLG modulator
fabrication schematic: 10 nm Al2O3 deposition
on Si WG with 20 nm Al2O3 between bottom and
top SLG. 10 nm Al2O3 is
used to encapsulate both SLGs to protect them during subsequent processing
steps, minimize contamination, and preserve μ. The bottom encapsulation
is used to maintain symmetry between the two SLGs, so that both are
in the same environment. (b) Raman spectra at 514 nm for the SLG closest
to the WG (SLG1) and that farthest from the WG (SLG2), as-grown on
Cu, after transfer, after device fabrication. The spectra are normalized
to I(G), with Cu background PL removal.97 (c) Schematic of SLG (gray) on SiO2 (green) top-gated
Hall bar with Ni/Au (yellow) contacts. (d) Measured RS (black) and calculated σd.c. (σd.c. = 1RS) (blue).
Red dashed line is the σd.c. linear fit for V > 0, showing the transition from linear to sublinear
regime
for V > 5 V.