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Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
Experimental Raman (ex. 266 nm) data and Voigt mode fittings for AlGaN and AlN E2(high) modes in five AlxGa1−xN/AlN/sapphire samples with x(Al) of 60.2%, 71.4%, 75.3%, 81.1%, and 87.7%, respectively.