Table 1.

Plasma parameters for different flow rates of Ar gas.

Flow Rate (L/min)	${\mathit{T}}_{\mathit{e}}$ (eV)	${\mathit{n}}_{\mathit{e}}$ × 1016 (cm−1)	${\mathit{N}}_{\mathit{D}}$	${\mathit{\omega }}_{\mathit{p}}$ × 1011 (rad/s)	${\mathit{\lambda }}_{\mathit{D}}$ × 10−7 (cm)
1	0.892	77.99	1645	499.15	7.95
2	0.927	83.63	1683	516.86	7.82
3	0.976	105.11	1622	579.45	7.16
4	1.253	111.97	2285	598.08	7.86
5	1.292	112.85	2383	600.42	7.95