Fig. 1. Channeling ¹⁵N-NRA apparatus and sample characterization.

a Schematic illustration of the channeling ¹⁵N-NRA apparatus developed in the present study. Nuclear reaction analysis (NRA) with ¹⁵N and Rutherford backscattering spectrometry (RBS) are simultaneously performed. Top views of TiH_x(110) with H (b) at the tetrahedral (T) and (c) at the octahedral (O) sites. Black and white circles represent Ti and H atoms, respectively. Blue and red lines represent the planes in which H is located or not, respectively. d Out-of-plane θ−2θ X-ray diffraction (XRD) pattern for the 90-nm TiH_1.47(110)/MgO(110) obtained by CuKα (λ = 1.5418 Å). Inset is a schematic figure of an fcc structure and T and O sites. e Hydrogen depth profile obtained by NRA for the TiH_1.47(110) sample at random incidence. The error bars in the plots represent the statistical uncertainty.