Fig. 2. Comparison of simultaneously obtained two-dimensional Ti-RBS and H-NRA mappings for the 90-nm-thick TiH_1.47 nanofilm with Monte Carlo simulations.

Two-dimensional (2D) mappings of normalized (a) Ti-RBS and (b) H-NRA yields as functions of θ and ϕ around the surface normal measured by ¹⁵N²⁺ beam with an energy of 6.45 MeV. 2D mappings of calculated nuclear close-encounter probabilities (NEP’s) for Ti (c) without and (d) with the blocking effect. 2D mappings of calculated NEP’s for the structures with H (e) at the T site (NEP(H_T)), (f) at the O site (NEP(H_O)), and (g) at both T and O sites at O-site occupation ratio z = 0.10 (NEP(H_T+H_O)). Vibrational amplitudes used in the calculations are 0.36, 0.25, and 0.45 Å for Ti, H in the T site, and H in the O site, respectively.