Fig. 1. Scheme and principle of the proposed structure for light absorption in a broadband spectrum range.
a Schematics of conventional Fabry-Perot resonance cavity and proposed GMR structure. b Design of GMR integrated InGaAs PD structures and design parameters of GMR structure. c 2D mapping results for the relative amount of absorption in AL grating period as a function of wavelength with fixed TAL = 1 μm. d RCWA simulation results with 1 μm AL PD on rear side engineering about InP substrate, flat metal structure, and GMR structure. e Electric field intensity distribution for 1.0 μm AL InGaAs PIN PDs on different bottom structures at 0.6 μm and 1.5 μm. f TAL dependent absorption spectra in terms of wavelength. g Top InGaAs layer thickness-dependent absorption spectra for visible light absorption