Fig. 3. The performances of InGaAs PDs with three different bottom structures.
a Schematics of the fabricated device structures with different bottom structures. b I–V characteristics for 1.0 μm AL InGaAs PD on InP, flat metal, GMR, and ideality factors as an inset figure (c) Surface leakage currents for 1 μm AL InGaAs PD with/without SU-8 passivation using size dependency. d Iph–Pin characteristics for 0.5 and 1 μm AL PDs on GMR Si. e Calculated f3dB for 15 × 15 μm2 devices in terms of TAL. f Calculated f3dB as a function of device width to confirm the transit time limited bandwidth