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| Type of substrate | Wave mode | Dielectric constant | TCF (ppm per °C) | Velocity (m s−1) | Detection limit or sensitivity | Reference |
|---|---|---|---|---|---|---|
| 64°YX LiNbO3 | SH-SAW | 85.2 | 80 | 4742 | 1.8 × 10−15 M | 55 |
| AIN | Love wave | 8.5 | 19 | 5700 | 6.54 × 105 CFU mL−1 | 45 |
| LiTaO3 | SH-SAW (LGS) | 470 | −33 | 4160 | 106 cells per mL | 56 |
| SiO2 | Love wave | 3.8 | — | — | 105 cells per mL | 57 |
