Skip to main content
. 2024 Nov 20;14(50):37087–37103. doi: 10.1039/d4ra06697a

Several types of piezoelectric materials used in SH-SAW sensors and their advantages.

Materials Orientation Frequency range (MHz) Coupling coefficient, K2 (%) Dielectric constant TCF [ppm per °C] Advantage Reference
36° YX LiTaO3 x-axis 100–150 5–6.6 43 32 Reduces the TCF, label-free detection, minimal energy loss, low signal loss, reproducibility 84 and 85
64° YX LiNbO3 x-axis ∼100 to ∼450 46.4 85.2 ∼80 Low cost, low power consumption, wide application, suitable for fluid loading 86 and 87
36° YX LiNbO3
Quartz z-axis 134–570 0.1–0.2 3.8 0 High sensitivity and temperature stability, low insertion loss 82 and 84
ZnO c-axis 153 1.5–1.7 8.66 ∼−60 Best microfluidic performance, simple operation, precision, low cost, fast response, and reduced reagent requirements 82, 85 and 88
All 520 3.1–8 8.5 19