Figure 4.

a) Schematic of oxidation process for TMDs by UV‐ozone treatment. b) Optical images of 3L MoS₂ with 0‐, 8‐, 12‐, and 24‐min treatments and AFM image after 24 min treatment. Reproduced under the terms of the CC‐BY‐NC‐ND 4.0 license.^{[ 84 ]} Copyright 2020, The Authors, Published by Elsevier B.V. c) Raman mapping of MoSe₂ upon sequent UV‐ozone treatments for 0, 3, and 7 min. Reproduced with permission.^{[ 85 ]} Copyright 2019, Royal Society of Chemistry. d) Optical images of MoS₂ flakes before and after UV‐ozone treatments. Reproduced with permission.^{[ 88 ]} Copyright 2022, American Chemistry Society. e) Cross‐sectional TEM image of HfO_x and MoS₂ heterostructures and elemental distributions acquired by an EELS spectrometer. Reproduced with permission.^{[ 93 ]} Copyright 2022, Springer Nature.