Figure 8.

a) Illustration of the mechanism for the ALE process of MoS₂ through Cl‐radical adsorption and Ar⁺‐ion desorption. Reproduced with permission.^{[ 132 ]} Copyright 2017, American Chemistry Society. b) AFM images and line profiles for MoS₂ before and after ALE. Reproduced with permission.^{[ 136 ]} Copyright 2016, American Chemistry Society. c) Schematic for the ALE process that involves oxidation and the wet etching process. OM images of WSe₂ with multiple cycles of ALE. Reproduced with permission.^{[ 24 ]} Copyright 2021, American Chemistry Society.