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Comparison of oxidation techniques in terms of cost, throughput, precision, oxidation strength, and self‐limiting properties.
| Air exposure | O2 plasma | UV‐ozone | Annealing | AFM/laser | |
|---|---|---|---|---|---|
| Cost | Low | High | Middle | Low | High |
| Throughput | Slow | Fast | Fast | Middle | Slow |
| Precision | Low | High | High | Low | High |
| Strength | Mild | Strong | Strong | Strong | Medium |
| Self‐limiting | Low | High | High | Low | Low |
