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Schematic images for manufacturing IPMSCs: (a) machining process and (b) machining mechanism of the Co substrate via EDM; (c–e) machining of Mo@Co-CoO integrated electrodes into designed patterns; (f–h) schematic diagram of the fabricated microdevices IPMSCs1, IPMSCs2, and IPMSCs3; (i–k) schematic fabrication process of IPMSCsB1.
