Table 1.
Structural parameters of CDRG.
| Parameter | Value |
|---|---|
| Outermost ring diameter | 3.8 mm |
| Center anchor diameter | 1.7 mm |
| Width | 13 μm |
| Spoke width | 13.5 μm |
| Thickness | 100 μm |
| Capacitive gap | 7.5 μm |
| Resonant frequency | 18,818 Hz |
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