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Basic characteristics of NiCr and NiSi thin films: (a) XRD patterns of NiCr thin films, NiCr target material, and the standard XRD pattern of Ni91Cr9 (wt.%); XRD patterns of NiSi thermoelectric electrodes, NiSi target material, and the standard XRD pattern of Ni94Si6 (wt.%). (b) EDS spectrum of the NiCr thin film. (c) EDS spectrum of the NiSi thin film.
